5 Axis Alignment Stage

The 5-axis alignment stage makes it ideal for alignment of optical systems such as Compound Refractive Lens (CRL) systems (see picture gallery). The 5-axis refers to the degrees of freedom, namely pitch, yaw, X, Y, and Z-axis (beam path). The stage has three (3) sub-stages, i.e., bottom (Z-axis), middle (X-axis, Y-axis, and yaw), and top (pitch). These sub-stages are usually assembled as a set, but they are independent sub-stages that can be separated depending on the customer’s requirement. The Z-axis is located at the bottom part of the stage. It has the most extended travel range suitable to adjust the position of the instrument along the beam direction. The X-axis, Y-axis, and yaw are on top of the Z-axis stage. The top stage is the pitch alignment stage and is directly mounted onto a plate that moves along the X-axis, Y-axis, and yaw.

Design Features:

  • Pitch, Yaw, X, Y, and Z-axis
  • Loads up to 300 kg
  • Custom mounting options
Show more

Technical specifications

Travel ranges 
X: +/- 20 mm
Y: +/- 11 mm
Z: +/- 300 mm
Pitch: +/- 2 degrees
Yaw: +/- 2 degrees

X: 0.28 um/step
Y: 0.066 um/step
Z: 0.71 um/step
Pitch: 0.6 millidegree/step
Yaw: 0.06 millidegree/step

Overall dimensions
Length: 1150 mm
Width: 450 mm
Height: 370 mm