Technical specifications
Travel ranges
X: +/- 20 mm
Y: +/- 11 mm
Z: +/- 300 mm
Pitch: +/- 2 degrees
Yaw: +/- 2 degrees
Resolution
X: 0.28 um/step
Y: 0.066 um/step
Z: 0.71 um/step
Pitch: 0.6 millidegree/step
Yaw: 0.06 millidegree/step
Overall dimensions
Length: 1150 mm
Width: 450 mm
Height: 370 mm