Technical specifications
Aperture size
Maximum: 7 mm x 7 mm
Minimum: Full overlap
Resolution
Aperture: 0.813 microns per full step
Translation: 0.322 microns per full step
Repeatability
< 1 micron
Accuracy
± 3 microns (over 3 mm)
Vacuum
O-ring sealed, high vacuum 10-5 mbar, low outgassing materials
Standard blades
2 mm thick tungsten carbide blades with a 2 degrees knife-edge profile
Limit switches (end-of-travel)
Included as standard on all motions
Guiding
High precision internal rails and carriages
Electrical connections
Limit switches coupled to 2 motor connectors (SUB-D 15 pins male)
Motors
2-phase stepping motors
Mechanical dimensions
145 mm x 145 mm x 80 mm
Mechanical connections
M6-threaded holes on the sides, as shown on the drawing, and KF-40 flange connections are on the body of both sides of the slit
Weight
≈ 1.6 kg
Outer surface
Anodized aluminum in color nature
Common options
Blades: Other blade shapes and materials
Adaptors: KF50 or CF40 flange connections
Special preparation for enabling vacuum <10-6 mbar
Internal wiring with Teflon insulation
Technical drawings
Wiring and connectors
Manuals
3D
