TECHNICAL SPECIFICATIONS
Number of absorbers
6 per arm, 4 arms = 24 absorbers
Absorber thickness
0.1 mm to 16 mm
Cooling capacity
50 W or 200 W (depending on design)
Positioning accuracy
10 µm
Repeatability
2-3 µm
Common x-translation stroke
20 mm
Vacuum level
UHV (1·10-9 mbar)
Position Material | Arm 1 | Arm 2 | Arm 3 | Arm 4 | |
---|---|---|---|---|---|
1 | Diamond | 0.1 mm | 0.2 mm | 0.4 mm | 0.8 mm |
2 | Diamond | 0.4 mm | 0.8 mm | 1.6 mm | 3.2 mm |
3 | Silicon | 0.2 mm | 0.4 mm | 0.8 mm | 1.6 mm |
4 | Silicon | 0.8 mm | 1.6 mm | 3.2 mm | 6.4 mm |
5 | B4C | 0.5 mm | 1.0 mm | 2.0 mm | 4.0 mm |
6 | B4C | 2.0 mm | 4.0 mm | 8.0 mm | 16.0 mm |