Technical specifications
Motion range
Z: 12 mm
Y: 15 mm
Accuracy
± 2 micron (over 2 mm)
± 4 micron (over 10 mm)
Resolution
Z: 0.1 micron per full step
Y: 0.1 micron per full step
Repeatability
± 1.0 micron (unidirectional)
Angular error
± 35 µrad Pitch, Yaw and Roll
(rotation around all axes)
Linear stiffness
Kx: < 0.4 µm/N
Ky: < 0.4 µm/N
Kz: < 0.1 µm/N
Angular stiffness
Kcx: < 8 µradian/Nm
Kcy: < 8 µradian/Nm
Kcz: < 8 µradian/Nm
Load capacity
~35 kg for high precision movement (specified)
>75 kg with fine precision
