Technical specifications
Aperture size
Maximum: 30 mm x 30 mm
Minimum: Full overlap
Resolution
1 micron per full step
Repeatability
± 0.4 micron (uni-directional)
Accuracy
± 2 microns over 3 mm in open loop and 0.5 microns in closed-loop
Vacuum
Stainless steel housing, copper gaskets, internal wiring of Kapton, UHV rated full metal guides and switches; only UHV rated materials
Standard blades
2 mm thick tungsten carbide blades which can be mounted either with a 0.5 degrees knife-edge or an R16 radius edge
Limit switches (end-of-travel)
UHV compatible, high-quality limit switches on all blades incl. UHV compatible wires
Guiding
High precision internal rails and carriages
Electrical connections
Limit switches coupled to 2 motor connectors (SUB-D 15 pins male) via UHV electrical feed-through
Motors
2-phase stepping motors
Mechanical dimensions
The external diameter of the UHV chamber: 202.50 mm
Distance from center to outer motor part: 196 mm
Thickness (excluding bolts): 140 mm length in beam direction (flange to flange)
Mechanical connections
DN-100CF on both sides as standard (Others are possible)
Weight
≈ 30.0 kg
Outer surface
Stainless steel
Common options
Blades: Blades in various materials and shapes
Flanges: Flanges other than 100CF can be specified
Encoders: Internal UHV compatible Renishaw linear encoders can be employed to measure true motion locally
Leak-current: Means for extracting leak-current from the blades a possible
Viewport: Chambers can be fitted with viewports if desired.
Supports and position: Supports and means for fine positioning and alignment of the slit
IB-C30-UHV with Pindiode
Passive cooling up to 5 W: Copper braids mounted between each blade and the steel chamber.
Active cooling up to 50 W: Please see IB-C30-UHV-50W
Technical drawings
Manuals
3D
