Technical specifications
Motion range
Z: ±15 mm
Y: ±15 mm
Accuracy*
± 3 micron (over the full range)
Resolution
Z: 0.2 micron per full step
Y: 0.2 micron per full step
Repeatability*
± 0.5 micron (unidirectional)
± 1.0 micron (bidirectional)
Linear stiffness
Kx: < 0.4 µm/N
Ky: < 0.4 µm/N
Kz: < 0.1 µm/N
Angular stiffness
Kcx: < 8 µradian/Nm
Kcy: < 8 µradian/Nm
Kcz: < 8 µradian/Nm
Load capacity
Up to 70 kg
* In closed loop tests
Have a look at our other linear positioning stages here.