Wedge-based heavy load YZ-Stage

This stiff, heavy load YZ wedge stage is designed to for the horizontal and vertical positioning of heavy components and beam optics which are attached through bellows. This requires stable and high precision control over motions. The heavy load wedge stage is built in such a way that the in-air vertical and lateral stages are based on a wedge system, which results in high mechanical stability. The movement is guided by rail/carriage systems. Both motions have direct encoders and are driven through worm-wheel reduction gearboxes, which offers inherently self-locking movements and high resolutions via a gearing ratio of 1:60. The travel ranges are limited by adjustable limit switches and hard stops to fulfill specific requirements.

Have a look at our other linear positioning stages here.

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Technical specifications

Motion range
Z: ±15 mm
Y: ±15 mm

Accuracy*
± 3 micron (over the full range)

Resolution
Z: 0.2 micron per full step
Y: 0.2 micron per full step

Repeatability*
± 0.5 micron (unidirectional)
± 1.0 micron (bidirectional)

Linear stiffness
Kx: < 0.4 µm/N
Ky: < 0.4 µm/N
Kz: < 0.1 µm/N

Angular stiffness
Kcx: < 8 µradian/Nm
Kcy: < 8 µradian/Nm
Kcz: < 8 µradian/Nm

Load capacity
Up to 70 kg

* In closed loop tests

Have a look at our other linear positioning stages here.