Technical specifications
Range
From 1-200 mm
Accuracy
1-2 µm
Resolution
<0.1 µm
Repeatability
<0.5 µm
Straightness
<50 µrad
XY-stage
XY-Stage
We design and produce XY-stages with ultra-high precision or ultra-high vacuum that match customer requirements with regards to size, accuracy, repeatability, resolution, straightness, and vacuum.
Many of our products involve XY-stages, and we have a thorough experience integrating XY-stages into various systems.
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