Z-Stage

We design and produce Z stages with ultrahigh precision, ultrahigh vacuum, and high load that match customer requirements with regards to size, accuracy, repeatability, resolution, straightness, load capacity, and vacuum compatibility.

Throughout the years, we have made many customized Z stages. One of them is the block elevator that has high accuracy and high load capacity and is the workhorse Z stage in many larger diffractometers. Another is the center elevator that fits into the center of the rotation stages, which leaves only the two flanges as the height in the compressed position.

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Technical specifications

Range
From 1-200 mm

Accuracy
1-2 µm

Resolution
<0.1 µm

Repeatability
<0.5 µm

Straightness
<50 µrad