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IB-C180-HV
IB-C180-HV is the largest standard slit system in our product range. It is based on a modified version of our IB-C80-HV. Similar to our other vacuum slit systems, it is guaranteed to operate smoothly down to 1E-5 mbar.
It features four individually movable blades providing a large 180 mm x 180 mm aperture. Special care has been taken to ensure that the forces generated by the vacuum do not adversely affect the operation and precision of the blade motion.
The motors are mounted at the other end of the lead screw on the airside. The proposed motor is Oriental Motor PK245M-01B with 400 step/rev. In combination with the 1 mm pitch lead screw, this gives a resolution of 2.5 μm per step. Driving with a micro-step controller, a mechanical resolution below 1 micron is possible.
The connection of the slit to the vacuum system is via a DN320LF flange. The slit house has a hole pattern for claw clamps and a smooth groove for o-ring gaskets.
Categories:
Technical Specifications
Aperture size
Maximum 180 mm x 180 mm
Minimum -5 mm x -5 mm
Blades are 105 mm wide (not fully overlapping)
Resolution
2.5 micron per full step
Accuracy
5 micron over the full range
Motion speed
5 mm/s with step frequency of 2000 Hz
Vacuum
O-ring sealed, high vacuum 10-5 mbar, low outgassing materials
Limit switches (end-of-travel)
Included as standard on all motions
Guiding
High precision internal rails and carriages
Electrical connections
Limit switches coupled to 2 motor connectors (SUB-D 15 pins male)
Motors
2-phase stepping motors
Mechanical dimensions
430 mm x 430 mm x 117 mm (housing only)
504 mm x 504 mm x 117 mm (with motors)
Mechanical connections
DN320LF vacuum flange. Any hole pattern on the bottom surface and the side without motor. Size M5 to M8 for mounting.
Weight
28 kg
Outer surface
Anodized aluminum in color nature
Common options
Blades: Various blade shapes and materials (thickness of blades up to 15 mm)
Motors: Custom high-resolution stepping, including IMS motors
Encoders: Back-axle rotary encoders or internal linear encoders (absolute or incremental)
Adaptors: Other KF(NW) flanges or CF flanges
Special preparation for enabling vacuum <10-6 mbar
Internal wiring of Kapton or wiring with Teflon insulation
